‘Fancy tool’: how China cut chip defects by 99% for near-perfect lithography

China's Breakthrough in Chip Manufacturing

Chinese researchers have made a significant breakthrough in chip manufacturing, reducing defects by 99% using a cryo-electron tomography (cryo-ET) process.

This process pinpoints the source of manufacturing flaws, achieving unprecedented clarity and potentially leading to major industry cost cuts.

"The team has proposed a solution compatible with existing semiconductor production lines,"
"It can reduce lithography defects on 12-inch (30cm) wafers by 99 per cent,"

Lithography is a critical step in chip manufacturing, equivalent to "printing circuits" onto semiconductor wafers such as silicon.

Author's summary: China achieves near-perfect lithography with cryo-ET.

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South China Morning Post South China Morning Post — 2025-10-30

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